3M™ Dyneon™ PFE 81TZ, PFE 131TZ and PFE 191TZ are technically advanced high temperature perfluorelastomers (HT PFE). They are designed to meet the challenges of higher temperature applications. They are classified as FFKM per ASTM D1418. Their fully fluorinated backbone structures provide a very broad chemical and thermal stability. Features and Benefits - Upper use temperature of 315°C - Can be compounded to pass AMS 7257D - Ideal for dry side (thermal processes) semiconductor applications including plasma, and high temperature CPI and aerospace applications - Low metal ion content with low extractables

3M™ Dyneon™ PFE 132TBZ is a technically advanced high temperature perfluorelastomer (HT PFE). It is designed to meet the challenges of higher temperature plasma applications. It is classified as FFKM per ASTM D1418. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Features and Benefits - Upper use temperature of 315°C - Excellent compression set resistance offering enhanced sealing force retention and seal life - Ideal for dry side (thermal processes) semiconductor applications including plasma - Low metal ion content with low extractables

3M™ Dyneon™ PFE 133TBZ is a technically advanced high temperature perfluorelastomer (HT PFE). It is designed to meet the challenges of higher temperature plasma applications. It is classified as FFKM per ASTM D1418. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Features and Benefits - Upper use temperature of 315°C - Excellent compression set resistance offering enhanced sealing force retention and seal life - Ideal for dry side (thermal processes) semiconductor applications including plasma - Low metal ion content with low extractables

3M™ Dyneon™ PFE 81TZ, PFE 131TZ and PFE 191TZ are technically advanced high temperature perfluorelastomers (HT PFE). They are designed to meet the challenges of higher temperature applications. They are classified as FFKM per ASTM D1418. Their fully fluorinated backbone structures provide a very broad chemical and thermal stability. Features and Benefits - Upper use temperature of 315°C - Can be compounded to pass AMS 7257D - Ideal for dry side (thermal processes) semiconductor applications including plasma, and high temperature CPI and aerospace applications - Low metal ion content with low extractables

Features and Benefits - Proprietary polymer and catalyst system enables the manufacture of optically clear finished parts - Phosphorous-free and silica-free formulation reduces the potential for contamination - Low extractables, low outgassing, and low particle generation for ultra high purity applications - Excellent temperature resistance optimizes performance in extreme environments (continuous, in-service temperatures to 300°C with peaks up to 350°C) - Excellent compression set offers enhanced sealing force retention and seal life - Proportionate polymer and catalyst package simplifies the mixing process - Smaller, easy to store packages for cleanroom handling

Features and Benefits - Phosphorous-free and silica-free formulation reduces the potential for contamination - Optically transparent - Excellent plasma resistance with low particle count - Low extractables, low outgassing, and low particle generation for ultra high purity applications - Excellent temperature resistance optimizes performance in extreme environments (continuous, in-service temperatures to 300°C with peaks up to 350°C) - Excellent compression set offers enhanced sealing force retention and seal life - Smaller, easy to store packages for cleanroom handling - Proportionate polymer and catalyst simplify the mixing process

3M™ Dyneon™ PFE 40Z is a technically advanced peroxide curable perfluoroelastomer, designed to meet the challenges of demanding sealing applications. This product is designed to have improved acid, water and steam resistance over 3M™ Dyneon™ PFE 90Z, since it can be formulated without the need for an inorganic base such as zinc oxide. It is classified as FFKM per ASTM D1418. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Features and Benefits - Ideal for wet chemical, fluid handling, cleaning and chemical etching processes for CPI, aerospace and semiconductor manufacturing - Good compression set resistance - Upper use temperature of 220°C - Low metal ion content with low extractables in a wide range of chemicals

3M™ Dyneon™ PFE 4131TZ is an incorporated cure high temperature perfluorelastomer (HT PFE). It is designed to meet the challenges of higher temperature applications. It is classified as FFKM per ASTM D1418. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Features and Benefits - PFE 131TZ compounded with curative for ease in manufacturing - Upper use temperature of 315°C - Excellent compression set resistance - Can be compounded to pass AMS 7257D - Ideal for dry side (thermal processes) semiconductor applications, including plasma, and high temperature CPI and aerospace applications - Low metal ion content with low extractables\

3M™ Dyneon™ PFE 60Z is a technically advanced peroxide curable perfluoroelastomer, designed to meet the challenges of demanding sealing applications. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Low viscosity provides good mold flow and is ideal for molding large parts. It is classified as FFKM per ASTM D1418. Features and Benefits - Improved mold flow and knitting over 3M™ Dyneon™ PFE 80Z and PFE 90Z - Ideal for wet chemical, fluid handling, cleaning and chemical etching processes, and for large parts for CPI and aerospace - Good compression set resistance - Upper use temperature of 220°C - Low metal ion content with low extractables in a wide range of chemicals - Can be utilized to adjust Mooney when using PFE 80Z or PFE 90Z

3M™ Dyneon™ PFE 80Z is a technically advanced peroxide curable perfluoroelastomer. This product is designed to have improved acid resistance and lower metal ion extractables, making it ideal for wet process electronics manufacturing such as semiconductor and flat panel display. It is classified as FFKM per ASTM D1418. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Features and Benefits - Very low metal ion content with low extractables in a wide range of chemicals - Ideal for wet chemical, fluid handling, cleaning and chemical etching processes and for semiconductor manufacturing - Can be compounded for better acid resistance than PFE 90Z - Upper use temperature of 200°C

3M™ Dyneon™ PFE 81TZ, PFE 131TZ and PFE 191TZ are technically advanced high temperature perfluorelastomers (HT PFE). They are designed to meet the challenges of higher temperature applications. They are classified as FFKM per ASTM D1418. Their fully fluorinated backbone structures provide a very broad chemical and thermal stability. Features and Benefits - Upper use temperature of 315°C - Can be compounded to pass AMS 7257D - Ideal for dry side (thermal processes) semiconductor applications including plasma, and high temperature CPI and aerospace applications - Low metal ion content with low extractables

3M™ Dyneon™ PFE 90Z is a technically advanced peroxide curable perfluoroelastomer, designed to meet the challenges of demanding sealing applications. It is classified as FFKM per ASTM D1418. Its fully fluorinated backbone structure provides a very broad chemical and thermal stability. Features and Benefits - Ideal for wet chemical, fluid handling, cleaning and chemical etching processes for CPI and aerospace - Good compression set resistance - Upper use temperature of 220°C - Low metal ion content with low extractables in a wide range of chemicals