Greene Tweed offers precision plastic components for a variety of demanding semiconductor applications. These components are made from a full range of high- performance plastic materials, including our Arlon ® 1000, which is ideal for applications requiring wear resistance, dimensional stability, and chemical compatibility without the assistance of additives.

PTFE, Linear Aromatic Polyester-Filled

Greene Tweed offers precision plastic components designed for a variety of demanding semiconductor applications. Avalon ® 56 HP, a high-performance, plastic-based thermoplastic on the latest generation modified PTFE, is ideal for improving the performance of wet wafer processing systems that require exceptional chemical resistance and very low extractable levels. In addition, Avalon ® 56 HP provides a very high level of purity, a wide temperature operating range, and superior low friction and dielectric properties.

Thermoset Resin Filled

Greene Tweed’s Chemraz ® 504, a 65 Shore A hardness perfluoroelastomer, provides an extremely broad range of chemical resistance and is perfect for services with low pressures and/or low temperatures. Chemraz ® 504 seals effectively in temperatures ranging from -22°F to 446°F (-30°C to 230°C). Chemraz ® 504 is well suited for a variety of applications, from mechanical seals to valve housings. Chemraz ® 504 is available for use as o-rings, gaskets, and many other custom shapes. Because of its versatility, Chemraz ® 504 is often used as a standard compound and can be found in a variety of fluids and solutions, including acids, caustics, aldehydes, esters, aromatics, hot water, steam, amines, methanol, ketones, TBA, and MTBE.

Greene Tweed’s Chemraz ® 505, a perfluoroelastomer, provides a broad range of chemical resistance, and is available for use as o-rings, gaskets, and many other custom shapes. Because of its versatility, Chemraz ® 505 is often used as a standard compound and can be found in a variety of applications, including acids, caustics, aldehydes, esters, ethers, aromatics, hot water, steam, amines, methanol, ketones, TBA, and MTBE. With a temperature range of -22°F to 446°F (-30°C to 230°C), Chemraz ® 505 is ideal for processes in subzero temperatures and for use in multisubstance plants or in mixed media due to its broad chemical resistance.

Greene Tweed’s Chemraz ® 510, a perfluoroelastomer, offers an extremely broad range of chemical resistance with a Shore A hardness value of 90. With a tempera-ture range from -22°F to 446°F (-30°C to 230°C), Chemraz ® 510 is well suited for use in a range of applications, from mechanical seals to pump housings. Because of its versatility, Chemraz ® 510 is often used as a standard compound for sealing at high pressures. It can be found in a variety of fluids and solutions including acids, caustics, aldehydes, esters, aromatics, hot water, steam, amines, methanol, ketones, TBA, and MTBE. Chemraz ® 510 is available for use as o-rings, gaskets, and many other custom shapes.

Chemraz ® 513 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. The material offers excellent performance in static plasma, photolithography, and diffusion processes where temperatures do not exceed 410°F (210°C) and high-sealing loads are not used. The hardness of this material allows for some hardware finish inconsistency.

Greene Tweed’s Chemraz ® 514, a perfluoroelastomer, is a white specialty compound, perfect for applications where contamination from carbon black must be prevented. Chemraz ® 514 offers a Shore A hardness value of 70. Because of its wide temperature range, -22°F to 428°F (-30°C to 220°C), Chemraz ® 514 is ideally suited for applications ranging from mechanical seals to valves. Available for use as o-rings, gaskets, and many other custom shapes.

Greene Tweed’s Chemraz ® 517, a perfluoroelastomer, is a white specialty compound, perfect for applications where contamination from carbon black must be prevented. Chemraz ® 517 has a Shore A hardness value of 80. Because of its wide temperature range, -22°F to 428°F (-30°C to 220°C), Chemraz ® 517 is well suited for use in a range of applications, from mechanical seals to mixers. Available for use as o-rings, gaskets, and many other custom shapes.

Chemraz ® 520 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. Chemraz ® 520 offers excellent performance in static and dynamic plasma and diffusion processes as well as static photolithography processes. Chemraz ® 520 is formulated for use in high sealing load applications and where temperatures do not exceed 464°F (240°C). Due to the hardness of this material, low-temperature applications may require smoother hardware surface finishes of 10 microinches (Ra) and below.

Greene Tweed’s Chemraz ® 541 is a universal, high-strength black compound designed for demanding applications. It boasts excellent chemical and compression set resistance and operates at temperatures up to 446°F/230°C. Thanks to its broad chemical compatibility, temperature range, and shape versatility, Chemraz ® 541 is an ideal choice for demanding environments and processes. Chemraz ® 541 maintains its properties when exposed to acids, acrylates, alcohols, aldehydes, amines, aromatics, esters, ethers, halogens, ketones, hot water, and steam. We leverage compounding experience, manufacturing expertise, and engineering knowledge to ensure customers receive the optimal material and design for their application. Greene Tweed's scientists and engineers are careful and methodical in the development of new compounds, undertaking numerous studies of processing variability to ensure our manufacturing team can deliver a consistent, quality product.

Chemraz ® 543 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. It offers excellent performance in etching, metalization, and diffusion processes where temperatures do not exceed 410°F (210°C). The hardness of this material allows for some hardware finish inconsistency.

Chemraz ® 550 is recommended for use in wet systems where chemical compatibility is required and small amounts of contamination are acceptable. This seal material has a wide variety of uses in dynamic or static processing equipment applications with service temperatures up to 410°F (210°C).

With its broad chemical resistance, Chemraz ® 551 is ideally suited as a universal sealing material for both aqueous and dry semiconductor wafer processing and chemical/DI water distribution systems. With the lowest outgassing profile for perfluoroelastomer materials in high-temperature applications, Chemraz ® 551 provides a cleaner process environment. Because of its reduced surface stiction, it can be used for semi-dynamic and static applications. Chemraz ® 551 remains stable at operating temperatures up to 572°F (300°C), while maintaining exceptional compression set. Chemraz ® 551 provides a significantly wider operational band and superior compression set resistance than any other broad range perfluoroelastomer on the market. With an upper temperature limit of 600°F (316°C), it’s the elastomer of choice for the most demanding applications from ozonated DI water to hot sulfuric resist strip. Chemraz ® 551 withstands the extreme thermal challenges typically found in LPCVD (low-pressure chemical vapor deposition), RTP (rapid thermal process), and epitaxial deposition systems. Chemraz ® 551's broad chemical resistance and high-temperature performance result in increased seal integrity, longer seal lifetimes, reduced downtimes, and higher wafer processing yields.

With its broad chemical resistance, Chemraz ® 555, a perfluoroelastomer, is ideally suited for challenging fluid handling applications. Chemraz ® 555 provides a significantly wider operational band and superior compression set resistance than any other broad range perfluoroelastomer on the market. With an upper temperature limit of 600°F (316°C), Chemraz ® 555 is the elastomer of choice for the most demanding services found in the chemical process and refining industries and semiconductor SubFabs. Chemraz ® 555 is suitable for use in a wide variety of media, including acids, caustics, aldehydes, esters, ethers, aromatics, hot water, steam, amines, methanol, ketones, TBA, MTBE, and mixed process streams. Chemraz ® 555 is one of Greene Tweed’s many cost-effective products and services that extend the reliability and life of our customers’ equipment in hostile conditions while protecting the public and the environment from unwanted emissions. Chemraz ® 555 is available in o-rings, gaskets, and many other custom shapes.

Chemraz ® 570 is recommended for a wide variety of semiconductor equipment wet processing applications where stringent seal reliability and contamination control is required. The material offers excellent performance in long-term static photolithography, acid/solvent, and ultrapure H2O applications.

Chemraz ® 571 is recommended for a wide variety of semiconductor equipment wet processing applications where stringent seal reliability and contamination control are required. It offers excellent performance in long-term static sealing applications in acid, solvent, and ultrapure H2O. Chemraz ® 571 is excellent for high-sealing load designs.

Greene Tweed’s Chemraz ® 584, a cream-colored perfluoroelastomer, is a specialty compound formulated to outlast the most demanding chemical process applications. Because of its outstanding overall chemical resistance, Chemraz ® 584 is the elastomer of choice for chlorine, ozone, strong oxidation fluids, and hot aqueous solutions. Its recommended temperature range is -22°F to 428°F (-30°C to 220°C). This unique cream compound is perfect for applications where contamination from carbon black must be prevented. Chemraz ® components are available for use as o-rings, gaskets, and many other custom shapes.

Chemraz ® 585, a perfluoroelastomer, is a specialty cream compound formulated to outlast the most demanding chemical process applications. With its outstanding overall chemical resistance, Chemraz ® 585 is the elastomer of choice for strong oxidation fluids and hot aqueous solutions. Its recommended temperature rangeis -22°F to 428°F (-30°C to 220°C). Chemraz ® components are available for use as o-rings, gaskets, and many other custom shapes.

Chemraz ® 592, a versatile perfluoroelastomer developed with a proprietary filler system, is very resistant to plasma attack. This compound’s durometer allows for some hardware finish inconsistency and higher sealing loads. It is well suited for critical seals in static and dynamic dry applications where reliability and purity are equally essential. Chemraz ® 592 is recommended for applications with service temperatures up to 464°F (240°C).

Chemraz ® 600, a perfluoroelastomer, works well in both high and low temperatures. It is capable of withstanding temperatures ranging from -4°F to 500°F (-20°C to 260°C). In addition, Chemraz ® 600 provides unparalleled performance in hot water and steam. Because of its high durometer rating (Shore A 90), components made from Chemraz ® 600 offer greater resistance in high-pressure and aggressive environments. Chemraz ® 600 has an extremely broad chemical resistance range and is made from a high-density base polymer. Chemraz ® 600 offers a low compression set and is perfect for sealing at high pressures. Components made from Chemraz ® 600 are available for use as o-rings, gaskets, and many other custom shapes.

Chemraz ® is a black synthetic rubber used to make high-performance seals and flexible parts with chemical and thermal compatibility similar to PTFE. Chemraz ® 605 is an ideal material for seals in in-vitro diagnostic (IVD), histology, analytical, and lab instrumentation. Seals made from Chemraz ® 605 maintain performance in nearly all relevant solvent and temperature combinations, typically for orders of magnitude longer than other seal materials, such as EPDM, silicone, or FKM.